Thickness Measurement Systems

Film thickness measuring systems by Semiconsoft cover the thickness range from 30Å to 450µm.

The spectral analysis of the reflection behavior provides reliable measurement data of non metallic single and multi layer materials.

An imediate conversion to refraction index or extinction value is possible by chosing the respective wavelength.

Semiconsoft offers stand alone systems as well as modules for installation in coating equipments or as accessory for standard lab microscopes. For production control in realtime automated measurement systems can be configured. Mapping provides the ability to measure larger areas.

Typical areas of application:

• Semi conductor production
• resist structures
• hard coating in the automotive field
• liquid crystal displays
• all kind of optical coatings